History
1991
Silicon Microstructures is founded in Fremont, California as a commercial source of high-performance silicon pressure sensors and accelerometers. Its first product is a silicon sensor for very low-pressure applications that is still about 20 times more sensitive than competing parts.
2001
Silicon Microstructures is acquired by ELMOS Semiconductor AG. The merger launches SMI on a path to next-generation pressure sensor products. These include higher-performance, system-level sensors, as well as co-integrated and bus-addressable microstructures for pressure sensing.
2002
In 2002 SMI relocates to Milpitas, acquiring IC Sensors' wafer fab operations and wafer R&D group. SMI begins a significant and complete wafer fab upgrade to expand the facility for full 6-inch wafer handling to meet the demand for its low pressure sensors.
2003
Fab renovations are completed. The facility is still processing primarily 4-inch wafers and has advanced etch capabilities including Deep Reactive Ion Etching (DRIE) for higher pressure sensor density and Plasma Enhanced Fusion Bonding.
2004
Start of 6-inch (150 mm) wafer volume production. SMI secures first major automotive design wins based on its microsystems business model enabling “smart” pressure sensors.
2005
Silicon Microstructures receives ISO9001:2000 certification. The company increases 6-inch production loading, supported by additional design wins for pressure sensors - mainly in the demanding automotive and medical markets.
2006
Silicon Microstructures begins 24/7 operations, ramping to 40,000 pressure sensors per day . In October SMI receives ISO/TS 16949 certification for its new six-inch MEMS production line. The certification enables the company to continue supporting the stringent requirements of the automotive pressure sensor industry through standardized production processes.
2007
Rainer Cholewa joins SMI as President and CEO.
