Innovation
Ultra-Small Pressure Sensor
The SM5108 is an ultra-small absolute pressure sensor for extremely size-sensitive high-volume applications. Over 24,000 die are available on one 150 mm wafer. As such, this die is ideally suited where yearly demand is over 2.5 million pieces. The die, as sawn, measures 0.65 mm x 0.65mm and is available in pressure ranges from 15 PSI to 150 PSI. Custom configurations can be made available as well -- please consult SMI sales for details.
Co-Integrated Digital Pressure Sensor
A single-chip pressure sensor, fabricated by means of a process flow compatible with standard CMOS and MEMS technology, combines all the analog and digital signal conditioning and pressure-sensing functions on the same chip, including the temperature and linearity correction required by the automotive industry. Featuring analog and digital signal output, this co-integrated design offers superior performance while reducing size compared to hybrid configurations. On-chip EEPROM stores the calibration and compensation values, and test results show a dramatic improvement in device perfomance over the uncompensated result. All current SM58xx products are based on this amplification and digital signal processing platform.
Ultra-Low Pressure Sensor
A new structure based on a two-step micro-machining process allowed to extend the range over which piezoresistive sensors can operate towards ultra-low pressures <50 kPa. Central to this approach is mechanical stress concentration based on a "bossed" structure with a suspended rigid area in the center of the diaphragm. The moveable surface deflects like a piston deformable plate. This allows force concentration and improved linearity.
