The SM9221 Series is a MEMS pressure sensor die employing piezoresistive technology for harsh media applications. Pressure is measured via the backside in full scale pressure ranges from 30, 60, 150 and 300 PSIA. The top side is protected with a top cap providing the highest reliability and protection for stringent automotive application requirements.
The SM5103 Series is a MEMS pressure sensor die employing piezoresistive technology. These devices are available in full scale pressure ranges from 0.3 to 3 PSIG (20 to 207 mbar). The SM5103 Pressure Die provides the highest OEM performance for ultra low pressure measurement.