Silicon Microstructures (SMI) announces miniature pressure sensor chip
Silicon Microstructures, Inc. (SMI) today announced that it has released a new pressure sensor in its broad product line of MEMS based sensors that opens up a new dimension in pressure sensor dies. The Model 5108 is a miniature...
Silicon Microstructures (SMI) completes expansion and renovation of its MEMS wafer fab
Silicon Microstructures, Inc. (SMI) today announced that it has completed the previously announced expansion and renovation of its MEMS (Micro Electro Mechanical Systems) wafer fab. While many MEMS companies have been...
Silicon Microstructures (SMI) embarks on major MEMS facility expansion
Silicon Microstructures, Inc. (SMI) today announced that it has begun implementation of a previously announced plan for a major expansion and renovation of its recently purchased MEMS wafer foundry. This project, to be completed...
Silicon Microstructures (SMI) releases SM5415 and SM5455 pressure sensors
Silicon Microstructures, Inc. (SMI) today announced that it has begun implementation of a previously announced plan for a major expansion and renovation of its recently purchased MEMS wafer foundry. This project, to be completed...
Expansion of Silicon Microstructures, Inc. MEMS Fabrication facility and equipment
Silicon Microstructures, Inc. (SMI), USA, a subsidiary of ELMOS Semiconductor AG (FSE:ELG), Germany, announced the expansion of its MEMS R&D effort and MEMS foundry and etch services. On July 29, 2002, SMI completed the purchase...
