Uncompensated Pressure Dies and Wafers
Targeted for sophisticated OEM customers, the SM5100 series consists of silicon pressure dies designed for use in a broad range of industrial, medical, automotive, and general-purpose applications. The series is ideal for high volume applications where cost is critical, such as consumer tire pressure gauges, disposable pressure monitors, engine control, blood pressure devices, pneumatic gauges, hand held meters, and home appliances. Silicon Microstructures specializes in low pressure sensing die.
SM5100 Series
Pressure Sensor Dies
| Pressure range | Pressure Type | |||||||||||
| 0.30 | 0.80 | 1.50 | 3.00 | 5 | 15 | 30 | 60 | 100 | 150 | 300 | A | G |
SM5102 |
|
|
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| X | X | X | X | X |
| X | X | X |
SM5103 | X | X | X | X |
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|
|
|
|
|
|
| X |
SM5106 |
|
|
|
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| X | X | X |
| X |
| X |
|
SM5108 |
|
|
|
|
| X | X | X |
| X |
| X |
|
SM5112 |
|
|
|
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| X | X | X |
| X | X | X |
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SM5102 The SM5102 family consists of silicon pressure sensing die ideal for OEM and high volume applications. These are available in gage or absolute configurations from 5 PSI to 300 PSI full scale.
Datasheet (PDF):
SM5103 The SM5103 family consists of silicon pressure sensing die suitable for ultra low pressure applications. These are available in gage configuration only ranging from 0.3 PSI to 3 PSI full scale.
Datasheet (PDF):
SM5106 The SM5106 family consists of silicon pressure sensing die suitable for high volume consumer application where low cost is essential. These are available only in absolute configurations ranging from 15 PSI to 150 PSI full scale.
Datasheet (PDF):
SM5108 The SM5108 family consists of silicon pressure sensing die suitable for extremely high-volume, low-cost pressure die applications. These are only available as absolute sensors and in 15 PSI to 150 PSI full-scale ranges.
Datasheet (PDF):
SM5112 The SM5112 family consists of silicon pressure sensing die suitable for sensing absolute pressure in harsh environments. Pressure is applied to the backside of the pressure die, overcoming many of the concerns of exposing the top surface of the die, which contains the sensing elements, to harsh environments. These are available only in absolute configurations ranging from 15 PSI to 300 PSI full scale.
Datasheet (PDF):
