SM6X91_Datasheet.pdf 931 KB
The SM6291, SM6391 and SM6491 Series are a low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical or horizontal ports. It is available in gauge, differential, asymmetric differential configurations. With dual porting, a reference measurement is possible to minimize errors due to changes in ambient pressure.
Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a custom correction algorithm.
|Pressure Range||0.3-0.79 PSI|
|Comp. Temp. Range||-20°C to +85°C|
|Port Type||Dual Vertical,|
|Digital Interface||I2C or SPI, 16 bit|
|Analog Output||10% to 90% of VDD|
|Supply Voltage||3.3 V/5 V|
1% FS (Digital)
1.5% FS (Analog)
Flow and Pressure Measurement in Respiratory Medical Equipment
The movie illustrates the benefits of using the SM9000 Family and the SM6000 Family for air flow control in respiratory medical equipment.