Targeted for sophisticated OEM customers, the SM5100 series
consists of silicon pressure dies designed for use in a broad range
of industrial, medical, automotive, and general-purpose
applications. The series is ideal for high volume applications
where cost is critical, such as consumer tire pressure gauges,
disposable pressure monitors, engine control, blood pressure
devices, pneumatic gauges, hand held meters, and home appliances.
Silicon Microstructures specializes in low pressure sensing
die.
SM5100 Series
Pressure Sensor Dies (Pressure Ranges in PSI)
|
Pressure Range |
Pressure Type |
| |
0.15 |
0.3 |
0.6 |
0.8 |
1.5 |
3 |
15 |
30 |
60 |
100 |
150 |
300 |
A |
G |
D |
S |
| SM5102 |
|
|
|
|
|
|
x |
|
|
|
|
|
x |
|
|
|
| SM5103 |
|
x |
|
|
|
|
|
|
|
|
|
|
|
x |
|
|
| SM5106 |
|
|
|
|
|
|
x |
|
|
|
|
|
x |
|
|
|
| SM5108 |
|
|
|
|
|
|
|
|
x |
|
|
|
x |
|
|
|
| SM5112 |
|
|
|
|
|
|
|
|
|
|
x |
x |
x |
|
|
|