SMI Launches MEMS Ultra-Low Pressure Sensor

Milpitas, California (PRWEB) August 13, 2015 – SMI (Silicon Microstructures, Inc.)  introduces the SM9543-005M-D-C-3-S MEMS pressure sensor designed especially for the ultra-low pressure market.  The 14-Bit resolution and 1.5% accuracy provide the user high performance while the 0.2% full-scale offset stability per year provides the reliability and long-term reliability for critical care products. Available in low pressure ranges of +/- 5 mbar (+/- 0.07 PSI).  The SM9543 stands to revolutionize the next generation of ultra-low pressure products with an I2C digital interface coupled with the highest accuracy and stability in the industry.

At the heart of the SM9543 is the MEMS pressure transducer with SMI’s novel and proprietary silicon technology platform. With SMI’s technology, the user can attain the highest level of accuracy with long-term high performance as demanded of the stringent medical industry.  Mating with the MEMS pressure sensor is a state-of-the-art signal-conditioning IC providing full pressure calibration and temperature compensation with a user-friendly I2C digital interface. The pressure sensor housing is based on standard surface mount technology standards and features a JEDEC compliant SOIC-16 footprint for straight-forward PCB design and assembly. Design engineers will appreciate the design flexibility and repeatability of the SM9543. Fully qualified and in production, the SM9543 is ready for design-in and user qualification.

Target Applications

  • VAV Controllers
  • HVAC
  • CPAP, Sleep Apnea
  • Exhaust Hoods
  • Spirometers
  • Life Sciences


  • Compensated Temperature Range: -5oC to +65oC
  • Accuracy: ±1.5% FS
  • I2C Digital Interface
  • Stable Offset Voltage
  • 14-bit Resolution
  • Voltage Supply:  3.3 Volts
  • Complies with RoHS and REACH requirements 

The new SM9543 pressure sensor features a digital output and our new proprietary ultra-low pressure die, which translates into higher resolution, better response time, and ease of interface with your application.  The SM9543 also allows SMI to custom calibrate and compensate the sensors to adapt the sensor to unique customer applications.

“We are very excited to debut the SM9543 Series to the Medical and Industrial markets. Our new MEMS sensor technology is the culmination of our low pressure expertise and we expect it will impress designer engineers,” said David Kertes, Vice-President of Sales at SMI.

About SMI
SMI is an ISO/TS16949:2009 certified premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with over 24 years of experience and expertise in low pressure and harsh environment pressure sensors that meet today’s stringent requirements for medical, automotive and industrial applications.  SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today.

SMI is a member of the worldwide Elmos Semiconductor Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems.

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