Low Pressure Digital & Analog Sensor (SM6X91)

The SM6291, SM6391 and SM6491 Series are a low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical or horizontal ports. It is available in gauge, differential, asymmetric differential configurations. With dual porting, a reference measurement is possible to minimize errors due to changes in ambient pressure.


Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a custom correction algorithm.

Key Attributes 
Product SeriesSM6X91
Pressure Range0.3-0.79 PSI
Pressure TypeGauge,
Differential,
Asymmetric
Comp. Temp. Range-20°C to +85°C
Package and Port TypeSOIC-16 Dual Vertical,
SOIC-16 Dual Horizontal,
SOIC-10 Single Vertical
Digital InterfaceI2C or SPI, 16 bit
Analog Output10% to 90% of VDD
Supply Voltage3.3 V/5 V
Accuracy1%-FS (Digital)
1.5%-FS (Analog)

 

Flow and Pressure Measurement in Respiratory Medical Equipment

The movie illustrates the benefits of using the SM9000 Family and the SM6000 Family for air flow control in respiratory medical equipment.

11/17/2019 CET

Disclaimer

Contact SMI for part availability. Silicon Microstructures, Inc. Warranty & Disclaimer / Terms & Conditions apply.

Part Number Data Sheet Pressure Type Pmax (PSI) Calibrated Pmax Output Type Package Type Characteristics Request
SM6291-BBE-S-006-001 Gauge 0.6 0.6 PSI Digital (I²C) and Amplified Analog SOIC-16 Horizontal

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6291-BBE-S-010-001 Gauge 0 0 PSI Digital (I²C) and Amplified Analog SOIC-16 Horizontal

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6291-BBE-S-021-000 Gauge 0 0 PSI Digital (I²C) and Amplified Analog SOIC-16 Horizontal

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6291-BCE-S-005-001 Gauge 0.7252 5 kPa Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks
Supply Voltage 5V

SM6291-BCE-S-030-000 Gauge 0.435 30 mbar Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6291-BCE-S-050-000 Gauge 0.725 50 mbar Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6291-BGC-S-040-000 Gauge 0.568 40 cmH2O Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp. -5˚C to +65˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6291-BGM-T-040-000 Gauge 0.568 40 cmH2O Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp.-5˚C to +65˚C
Digital Accuracy 1%FS
Shipped in Tape&Reel

SM6391-BCE-S-005-001 Differential 0.7252 5 kPa Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6391-BCE-S-040-000 Differential 0.568 40 cmH2O Digital (I²C) and Amplified Analog SOIC-16 Vertical

Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks

SM6491-BCE-S-040-000 Asymmetric 0.568 40 cmH2O Digital (I²C) and Amplified Analog SOIC-16 Vertical

Calibrated Pmin -5 cmH2O
Comp. Temp. -20˚C to +85˚C
Digital Accuracy 1%FS
Shipped in Sticks