Low Pressure Digital Sensor (SM6X21)

The SM6221, SM6321 & SM6421 Series is a digital, low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option. It is available in both compound gage or differential pressure configurations. With the dual porting, a vacuum-gage measurement is possible to minimize altitude errors due to changes in ambient pressure.

Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a custom correction algorithm.


Customer-specified pressure ranges and supply voltages are available.
The SM6X21 is shipped in sticks or tape & reel.

Key Attributes 
Product SeriesSM6X21
Pressure Range0.3-0.79 PSI
Pressure TypeGauge,
Comp. Temp. Range-20°C to +85°C
Package and Port TypeSOIC-16 Dual Vertical,
SOIC-16 Dual Horizontal,
SOIC-10 Single Vertical
Digital InterfaceI2C, 14 bit
Supply Voltage3.3 V/5 V


Flow and Pressure Measurement in Respiratory Medical Equipment

The movie illustrates the benefits of using the SM9000 Family and the SM6000 Family for air flow control in respiratory medical equipment.