Ultra Low Differential Pressure Digital Sensor (SM933X)

The SM9333 and SM9336 are digital, ultra-low pressure MEMS sensors offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with dual vertical ports. The SM9333/SM9336 devices feature differential pressure measurement, the SM9333 offers a pressure range of -125 Pa to +125 Pa respectively, the SM9336 offers a pressure range of -250 Pa to +250 Pa.


The total accuracy after board mount and system level autozero is less than 1%FS. The excellent warmup behavior and long term stability further assures its expected performance over the life of the part.


Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a custom correction algorithm.


The SM9333/SM9336 are shipped in sticks or tape & reel.

Key Attributes 
Product SeriesSM933X
Pressure Range+/-125 Pa, +/- 250 Pa
Pressure TypeDifferential
Comp. Temp. Range-20°C to +85°C
Package TypeSOIC-16
Port TypeDual Vertical
Digital InterfaceI2C, 16 bit
Supply Voltage3.3 V/5 V
Accuracy after Autozero1.25 %FS (+/-125 Pa)
1 %FS (+/-250 Pa)


Flow and Pressure Measurement in Respiratory Medical Equipment

The movie illustrates the benefits of using the SM9000 Family and the SM6000 Family for air flow control in respiratory medical equipment.