Backside Pressure Harsh Media Die (SM99A)

The SM99A is a silicon micro-machined, piezoresistive pressure-sensing chip. The SM99A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials. Therefore, the electronic structures on the front side of the die will not be affected during operation. This results in a durable pressure sensor suitable for challenging applications. The family will be qualified using AEC-Q100 Level 0 Automotive standards.  An on-board temperature diode is provided for point-of-use temperature sensing.

Samples are available in a full-scale range of 1 Bar, 4 Bar and 8 Bar absolute (14.5, 58 and 116 PSIA) and is ideal for OEM and high-volume applications.

Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system. They also may be packaged into proprietary, or application specific sensor lines.

Key Attributes
Product SeriesSM99A
Pressure Range1, 4, 8 Bar
Pressure TypeAbsolute
Operating Temp. Range-40°C to +150°C
Span23 – 30 mV/V
Linearity+ 0.3% FS
Die Size1.20 x 1.28 mm
Part NumberPressure RangeBack SurfaceDie Indentifier
SM99A-H-NV-001B-0000A1 bar / 14.5 PSIAStandardWafermap
SM99A-H-IV-001B-0000A1 bar / 14.5 PSIAStandardInked
SM99A-H-NV-004B-0000A4 bar / 58 PSIAStandardWafermap
SM99A-H-IV-004B-0000A4 bar / 58 PSIAStandardInked
SM99A-H-NV-008B-0000A8 bar / 116 PSIAStandardWafermap
SM99A-H-IV-008B-0000A8 bar / 116 PSIAStandardInked