Backside Pressure Harsh Media Die (SM98A)

The SM98A is a silicon micro-machined, piezoresistive pressure-sensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials. Therefore, the electronic structures on the front side of the die will not be affected during operation. This results in a durable pressure sensor suitable for challenging applications. The family has been qualified using AEC-Q100 Level 0 Automotive standards.

This device is available in a full-scale range of 10 Bar and 20 Bar absolute (145 and 280 PSIA) and is ideal for OEM and high-volume applications.

Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system. They also may be packaged into proprietary, or application specific sensor lines.  Backside metal for eutectic bonding is available.

Dies are probed, diced, inspected, and shipped on tape.  Devices with backside metal are shipped on UV release tape.

Key Attributes
Product SeriesSM98A
Pressure Range10-50 Bar
Pressure TypeBackside Absolute
Operating Temp. Range-40°C to +150°C
Part NumberPressure RangeBack Surface
SM98A-H-ND-010B-0000A10 bar/145 PSIAStandard
SM98A-H-ND-020B-0000A20 bar/290 PSIAStandard
SM98A-H-NV-010B-0001A10 bar/145 PSIAEutectic Metal
SM98A-H-NV-020B-0001A20 bar/290 PSIAEutectic Metal
SM98A-H-ID-010B-0000A10 bar / 145 PSIAStandard
SM98A-H-ID-020B-0000A20 bar / 290 PSIAStandard
SM98A-H-IV-010B-0001A10 bar / 145 PSIAEutectic Metal
SM98A-H-IV-020B-0001A20 bar / 290 PSIAEutectic Metal