- SM30_D_datasheet.pdf548 KB
The SM30D is a silicon micro-machined, piezoresistive pressure sensing die. This device is available with a full-scale range of 5 to 150 PSI. A 500 PSI version is in development. Both open-bridge and closed-bridge versions are available. Noble metal bondpads are also optionally available for use in corrosive or other harsh environments. This sensor is ideal for OEM and high-volume applications. Provided in die form, these sensors can be mounted on ceramic on a variety of substrates or packages as part of an OEM system. They also may be packaged into proprietary or application specific sensor lines. The SM30D die are electrically probed, diced, inspected and shipped on tape. Electronic wafer maps are provided with each wafer.
|Pressure Range||5-500 PSI|
|Operating Temp. Range||-40°C to +150°C|
|Part Number||Pressure Range||Pressure Type|