Ultra Low Pressure Die (SM95D/G)

The SM95D/G is a silicon micro-machined, piezoresistive pressure sensing die. This device is available with a full-scale range of 0.15 to 1.50 PSI (1.0 to 10 kPa) and is ideal for OEM and high-volume applications. Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system. They also may be packaged into proprietary or application specific sensor lines. Dies are electrically probed, diced, inspected, and shipped on tape.

Key Attributes 
Product SeriesSM9520
Pressure Range0.15 to 1.5 PSI
Pressure TypeGauge,
Differential
Operating Temp. Range-40°C to +85°C
Part NumberPressure RangePressure Type
SM9520-010M-G-D0.15 PSIGage
SM9520-040M-G-D0.60 PSIGage
SM9520-100M-G-D1.50 PSIGage