Ultra Low Pressure Die (SM95G)

The SM95G is a silicon micro-machined, piezoresistive pressure sensing die. This device is available with a full-scale range of 0.15 to 1.50 PSI (1.0 to 10 kPa) and is ideal for OEM and high-volume applications. Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system. They also may be packaged into proprietary or application specific sensor lines. Dies are electrically probed, diced, inspected, and shipped on tape. Dies are electrically probed, diced, inspected, and shipped as 200mm wafers on tape.

Key Attributes 
Product SeriesSM9520
Pressure Range0.15 to 1.5 PSI
Pressure TypeGauge,
Differential
Operating Temp. Range-40°C to +85°C
Part NumberPressure RangePressure Type
SM9520A-010M-G-D0.15 PSIGage
SM9520A-040M-G-D0.60 PSIGage
SM9520A-100M-G-D1.50 PSIGage